14 GHz microstrip MEMS phase shifters on flexible, organic substrate

One and two bit microelectromechanical system (MEMS) microstrip phase shifters at 14 GHz have been realized on 100 μm liquid crystal polymer (LCP) substrate. This paper presents for the first time a MEMS phase shifter on a flexible, organic substrate. LCP is a well-suited substrate for low-cost, low-loss, and near-hermetic applications. Multibit phase shifters have applications in almost all microwave devices, but are most commonly used in phased antenna arrays, which can be realized on a rollable substrate using this technology. The one-bit phase shifters have an average return loss of 19.0 dB and an average insertion loss of 0.59 dB at 14 GHz. The phase shifts are within 1.38° of the intended phase shift at this frequency. For the two-bit phase shifters, an average return loss of 22.5 dB and an average insertion loss of 0.98 dB were measured per bit. The average phase error for the two-bit phase shifter is only 1.26°.