Characterization of immobilized DNA probes on the surface of silicon compatible materials

In this paper, the objectives and methodologies of deoxyribonucleic acid (DNA) analysis based on micro arrays produced by microelectronic fabrication technology is reviewed. The important issue of material compatibility between DNA material and silicon based material is addressed. With a special surface treatment, DNA probes have been successfully attached (or immobilized) on the surface of silicon compatible materials (mainly silicon dioxide). Through the use of optical labels that emit optical fluorescence under the illumination of a UV light source, the number of DNA probes immobilized on the silicon dioxide surface can be quantified. The results are further analyzed with atomic force microscopy to visualize the surface conditions. The successful immobilization of DNA probes on silicon wafers is very important for the fabrication of DNA chips for DNA analysis