Title :
Hartmann screen test for measurement of stress during thin film deposition
Author :
Wilksch, Philip ; Forouzandeh, Farhad
Author_Institution :
Sch. of Appl. Sci., RMIT Univ., Melbourne, VIC
Abstract :
The Hartmann screen test for measuring changes in curvature of a surface has been adapted to create a system for continuous in situ monitoring of the internal stress in thin films during plasma deposition.
Keywords :
internal stresses; materials testing; plasma deposited coatings; stress measurement; thin films; Hartmann screen test; internal stress; plasma deposition; stress measurement; thin film deposition; Apertures; Focusing; Internal stresses; Laser beams; Plasma displays; Plasma measurements; Sputtering; Stress measurement; Surface fitting; System testing;
Conference_Titel :
Optical Fibre Technology/Australian Optical Society, 2006. ACOFT/AOS 2006. Australian Conference on
Conference_Location :
Melbourne, VIC
Print_ISBN :
978-0-9775657-1-9
Electronic_ISBN :
978-0-9775657-1-9
DOI :
10.1109/ACOFT.2006.4519323
