• DocumentCode
    3435113
  • Title

    Program disturbs and process optimization in a 65 nm Flash FPGA

  • Author

    Jia, J.Y. ; Singaraju, Pavan ; Micael, H. ; Liu, Peng ; Sammie, S. ; Dhaoui, Fethi ; Hawley, Frank ; Chi Ren ; Zhi Guo Li ; Boon Keat Toh ; Zhao Bing Li ; Tzu-Yun Chang ; Jing Horng Gau ; Yau Kae Sheu

  • Author_Institution
    Microsemi Corp., San Jose, CA, USA
  • fYear
    2012
  • fDate
    14-18 Oct. 2012
  • Firstpage
    117
  • Lastpage
    118
  • Abstract
    We present studies of an extrinsic program disturb mechanism in a Field Programmable Gate Array (FPGA) fabricated with a 65 nm embedded-Flash process. It is concluded that multiple positive charges are involved during disturb to explain the observed extrinsic behavior. Its failure rate was improved with tunnel oxidation process tuning and stronger pre-oxidation cleans.
  • Keywords
    circuit optimisation; circuit tuning; failure analysis; field programmable gate arrays; oxidation; embedded-flash process; extrinsic program disturb mechanism; failure rate; field programmable gate array; flash FPGA; multiple positive charges; observed extrinsic behavior; preoxidation cleans; process optimization; size 65 nm; tunnel oxidation process tuning; Arrays; Field programmable gate arrays; Logic gates; Optimization; Programming; Silicon; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
  • Conference_Location
    South Lake Tahoe, CA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4673-2749-7
  • Type

    conf

  • DOI
    10.1109/IIRW.2012.6468933
  • Filename
    6468933