Title :
The application of a modified Blech product to aluminum-based metallization for increased current density
Author_Institution :
Analog Devices, Inc., Wilmington, MA, USA
Abstract :
An investigation into the Blech effect on aluminum-based metallization shows that modifying the Blech product (jL) to j2L allows electromigration lifetimes for short line segments to be extrapolated to operating conditions. The use of this modified Blech product in calculating current acceleration provides good correlation with n from Black´s equation.
Keywords :
aluminium; electromigration; metallisation; Al; Black equation; Blech effect; aluminum-based metallization; current acceleration; current density; electromigration lifetimes; modified Blech product; short line segments; Acceleration; Current density; Electromigration; Metallization; Stress; Testing;
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
Conference_Location :
South Lake Tahoe, CA
Print_ISBN :
978-1-4673-2749-7
DOI :
10.1109/IIRW.2012.6468937
