Microsystem design using simulator coupling

Author

Wünsche, S. ; Clauß, C. ; Schwarz, P. ; Winkler, E.

Author_Institution

Fraunhofer-Inst. for Integrated Circuits, Dresden, Germany

fYear

1997

fDate

17-20 Mar 1997

Firstpage

113

Lastpage

118

Abstract

The microsystem design process is characterized by interdisciplinary approaches and close interactions between different domains. A methodology for simulating the performance of complex microsystems using simulator coupling is presented. The technique is based on the coupling of the FEM program ANSYS with the circuit and system simulator SABER. In difference to other known simulator couplings a time step algorithm is employed. Its methodology is reported and the implementation into simulation tools is explained. The system simulations of an acceleration sensor system as well as the simulation of thermal interactions in integrated circuits prove the suitability of the coupling. Finally simulation results are discussed and advantages of the implemented coupling are concluded

Keywords

accelerometers; circuit CAD; circuit analysis computing; digital simulation; finite element analysis; microsensors; ANSYS; FEM program; SABER; acceleration sensor system; circuit/system simulator; integrated circuits; microsystem design process; simulator coupling; thermal interactions; time step algorithm; Analytical models; Circuit simulation; Circuits and systems; Coupling circuits; Differential equations; Partial differential equations; Performance analysis; Process design; Sensor systems; Virtual prototyping;

fLanguage

English

Publisher

ieee

Conference_Titel

European Design and Test Conference, 1997. ED&TC 97. Proceedings

Conference_Location

Paris

ISSN

1066-1409

Print_ISBN

0-8186-7786-4

Type

conf

DOI

10.1109/EDTC.1997.582342

Filename

582342