Dynamic precision reliability analysis for six degrees of freedom micro-displacement mechanism of reticle stage in lithography machine based on Monte-Carlo

Author

Dashuang Luo ; Kesheng Wang ; Longlong Zhang ; Jing Li ; Zhonglai Wang ; Hong-Zhong Huang

Author_Institution

Sch. of Mech., Electron., & Ind. Eng., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2013

fDate

15-18 July 2013

Firstpage

250

Lastpage

252

Abstract

Multi-layer lithography machine is one of the most important equipment in integrated circuit production and it has attracted considerable interests on the dynamic reliability and precision reliability. This paper focuses on the dynamic precision reliability of six DOF micro-displacement mechanism in reticle stage, and establishes a dynamic error model based on homogeneous coordinate array theory. The dynamic precision reliability of each movement direction is calculated by MonteCarlo. The dynamic precision reliability analysis provides a theoretical basis for the precision reliability assurance and the reliability design of the micro-displacement mechanism.

Keywords

Monte Carlo methods; integrated circuit manufacture; lithography; production equipment; reliability; stepping motors; Monte Carlo methods; dynamic error model; dynamic precision reliability analysis; dynamic reliability; homogeneous coordinate array theory; integrated circuit production; microdisplacement mechanism; multilayer lithography machine; reticle stage; Integrated circuit reliability; Lithography; Reliability engineering; Reliability theory; Standards; Vectors; dynamic error model; dynamic precision reliability; lithography mechine; reliability anlysis; six DOF reticle stage;

fLanguage

English

Publisher

ieee

Conference_Titel

Quality, Reliability, Risk, Maintenance, and Safety Engineering (QR2MSE), 2013 International Conference on

Conference_Location

Chengdu

Print_ISBN

978-1-4799-1014-4

Type

conf

DOI

10.1109/QR2MSE.2013.6625576

Filename

6625576