• DocumentCode
    3435906
  • Title

    Special interest group: FWLR monitoring guideline

  • Author

    Martin, Andreas ; Aal, Andreas

  • Author_Institution
    Corporate reliability department, Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg, Germany
  • fYear
    2012
  • fDate
    14-18 Oct. 2012
  • Firstpage
    225
  • Lastpage
    226
  • Abstract
    The main subject of this discussion was to inform about the intention to propose the available fWLR (fast Wafer Level Reliability) Monitoring guideline as JEDEC publication. fWLR Monitoring is a methodology providing process reliability data from productive wafers using specially designed scribe line test structures and short stresses [1–3].
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
  • Conference_Location
    South Lake Tahoe, CA, USA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4673-2749-7
  • Type

    conf

  • DOI
    10.1109/IIRW.2012.6468969
  • Filename
    6468969
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3435906