Title :
Special interest group: FWLR monitoring guideline
Author :
Martin, Andreas ; Aal, Andreas
Author_Institution :
Corporate reliability department, Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg, Germany
Abstract :
The main subject of this discussion was to inform about the intention to propose the available fWLR (fast Wafer Level Reliability) Monitoring guideline as JEDEC publication. fWLR Monitoring is a methodology providing process reliability data from productive wafers using specially designed scribe line test structures and short stresses [1–3].
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2012 IEEE International
Conference_Location :
South Lake Tahoe, CA, USA
Print_ISBN :
978-1-4673-2749-7
DOI :
10.1109/IIRW.2012.6468969
