DocumentCode
3436235
Title
Exploring design spaces for optical MEMS devices
Author
Gilbert, J.R.
Author_Institution
Microcosm Technol. Inc., Cambridge, MA, USA
fYear
1996
fDate
5-9 Aug. 1996
Firstpage
54
Lastpage
55
Abstract
The MEMCAD system enables the designer of Optical Micro-Electro-Mechanical Systems to explore interesting design spaces in simulation. In this paper we investigate the space of torsional micromirrors and explore three specific micromirror designs.
Keywords
CAD; digital simulation; micromechanical devices; mirrors; optical design techniques; solid modelling; MEMCAD system; design spaces; micromirror designs; optical MEMS devices; optical micro-electro-mechanical systems; simulation; solid models; torsional micromirrors; Electrodes; Microelectromechanical devices; Micromechanical devices; Micromirrors; Mirrors; Optical design; Optical devices; Space exploration; Space technology; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location
Keystone, CO, USA
Print_ISBN
0-7803-3175-3
Type
conf
DOI
10.1109/LEOSST.1996.541092
Filename
541092
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