Title :
Exploring design spaces for optical MEMS devices
Author_Institution :
Microcosm Technol. Inc., Cambridge, MA, USA
Abstract :
The MEMCAD system enables the designer of Optical Micro-Electro-Mechanical Systems to explore interesting design spaces in simulation. In this paper we investigate the space of torsional micromirrors and explore three specific micromirror designs.
Keywords :
CAD; digital simulation; micromechanical devices; mirrors; optical design techniques; solid modelling; MEMCAD system; design spaces; micromirror designs; optical MEMS devices; optical micro-electro-mechanical systems; simulation; solid models; torsional micromirrors; Electrodes; Microelectromechanical devices; Micromechanical devices; Micromirrors; Mirrors; Optical design; Optical devices; Space exploration; Space technology; Voltage;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.541092
