Development of mass productive micro stereo lithography (Mass-IH process)

Author

Ikuta, Koji ; Ogata, Tsutkasa ; Tsubio, Masahiro ; Kojima, Syunsuke

Author_Institution

Sch. of Eng., Nagoya Univ., Japan

fYear

1996

fDate

11-15 Feb 1996

Firstpage

301

Lastpage

306

Abstract

Mass productive 3D micro fabrication process based on micro stereo lithography is proposed and verified experimentally. By using an array of micro optical fibers, a new multi-beam scanning method with high accuracy can be obtained in the whole fabrication area. Since this technique is based on the “IH process” developed (Ikuta et al., MEMS´93, 94), it was named “Mass-IH process”. This process enables us to fabricate MIFS (Micro INtegrated Fluid System) under mass and low cost production similar to silicon process. Future applications of MIFS for Biochemical LSI” and “Biochemical Computer” along with biomedical devices are described

Keywords

arrays; biocomputers; biocontrol; biomedical equipment; biotechnology; chemical technology; fibre optic sensors; fluidic devices; microactuators; micromachining; microsensors; photolithography; 3D micro fabrication process; IH process; Mass-IH process; UV curable polymer; array of micro optical fibers; biochemical LSI; biochemical computer; biomedical devices; biotechnology; high aspect ratio; hybridization; mass productive micro stereo lithography; micro chemomechatronics; micro integrated fluid system; micropipes; multi-beam scanning method; Application software; Biomedical computing; Costs; Lithography; Mass production; Optical arrays; Optical device fabrication; Optical fibers; Production systems; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493998

Filename

493998