DocumentCode :
343659
Title :
FSS array generation by optical means
Author :
Lockyer, D.S. ; Vardaxoglou, J.C. ; Kearney, M.J.
Author_Institution :
Loughborough Univ., UK
fYear :
1999
fDate :
April 1 1999-March 31 1999
Firstpage :
132
Lastpage :
135
Abstract :
We have demonstrated a basic technique for optically generating arrays of periodic grids as a pseudo-metallic, electron-hole plasma region within a semiconductor wafer. The wafers used were high resistivity silicon to give dielectric-like dark behaviour, in order to contrast with the generated plasma. The theory of the work is based on the characterisation of the plasma by means of its surface impedance, which in turn is dependent on the complex permittivity. We have demonstrated theoretically, generation dimensions. Results have been presented in the frequency range 18-40 GHz to confirm that grids have been optically cast onto the wafers using negative image masks of the desired pattern.
Keywords :
microstrip antenna arrays; 18 to 40 GHz; EHF; FSS array generation; SHF; Si; complex permittivity; dielectric-like dark behaviour; negative image masks; optical casting; periodic grids; planar antenna arrays; pseudo-metallic electron-hole plasma region; semiconductor wafer; surface impedance;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Antennas and Propagation, 1999. IEE National Conference on.
Conference_Location :
York, UK
Print_ISBN :
0-85296-713-6
Type :
conf
Filename :
788854
Link To Document :
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