Silicon active slot loop antenna with micromachined trenches

A new structure for a slot loop antenna fabricated on a high resistivity P-type(10 k/spl Omega/cm) silicon wafer is presented. Wet etched micromachined trenches with conductor hangovers form the slot loop. This method effectively reduces the effective dielectric constant of the substrate and enhances the radiation efficiency. The processing methods used and the extension of the antenna configured as a self-oscillating active antenna are discussed.