Title :
2003 IEEE International Reliability Physics Symposium Proceedings 41st Annual (Cat. No.03CH37400)
fDate :
March 30 2003-April 4 2003
Abstract :
The following topics are dealt with: circuits; high k dielectrics; SER; latch-up; interconnects; BEOL dielectrics; transistors; ESD; device and process technology; compound semiconductors; SiGe; product reliability; gate dielectrics; packaging; MEMS; memories; failure analysis.
Keywords :
Ge-Si alloys; dielectric thin films; electrostatic discharge; failure analysis; integrated circuit interconnections; integrated circuit packaging; integrated circuit reliability; integrated circuit technology; integrated memory circuits; micromechanical devices; semiconductor device reliability; semiconductor technology; BEOL dielectrics; ESD; MEMS; SER; SiGe; circuits; compound semiconductors; device technology; failure analysis; gate dielectrics; high k dielectrics; interconnects; latch-up; memories; packaging; process technology; product reliability; reliability physics; transistors;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International
Conference_Location :
Dallas, TX, USA
Print_ISBN :
0-7803-7649-8
DOI :
10.1109/RELPHY.2003.1197710
