Title :
A μ-magnetometer based on electron tunneling
Author :
Miller, L.M. ; Podosek, J.A. ; Kruglick, E. ; Kenny, T.W. ; Kovacich, J.A. ; Kaiser, W.J.
Author_Institution :
Center for Space Microelectronics Technol., California Inst. of Technol., Pasadena, CA, USA
Abstract :
In this paper, a working prototype of a μ-magnetometer based on electron tunneling is described. The tunneling μ-magnetometer offers a unique combination of advantages including high resolution (~10-9 Tesla/√Hz), vector sensitivity, wide bandwidth (>10 kHz), low power (<100 mW), small size (1 cm×1 cm×0.6 mm), robustness, wide dynamic range (>100 dB), and small temperature coefficient. The preliminary noise equivalent magnetic field (NEB) for a prototype is 6 μT/√Hz, in good agreement with a device performance model. Linear response to increasing DC and AC magnetic fields is also demonstrated. Finally, work in progress to improve the NEB to 4 nT/√Hz is described
Keywords :
magnetic field measurement; magnetometers; micromachining; microsensors; semiconductor device noise; space vehicle electronics; tunnelling; 0.6 mm; 1 cm; 10 kHz; 100 mW; bulk micromachining; device performance model; electron tunneling; high resolution; linear response; low power; magnetic field measurement; microelectromechanical sensor; noise equivalent magnetic field; robustness; small size; small temperature coefficient; spacecraft use; tunneling μ-magnetometer; vector sensitivity; wide bandwidth; wide dynamic range; Bandwidth; Dynamic range; Electrons; Magnetic fields; Noise robustness; Prototypes; Temperature distribution; Temperature sensors; Tunneling; Vectors;
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
DOI :
10.1109/MEMSYS.1996.494027
