Leakage, breakdown, and TDDB characteristics of porous low-k silica-based interconnect dielectrics

Author

Ogawa, Ennis T. ; Kim, Jinyoung ; Haase, Gad S. ; Mogul, Homi C. ; McPherson, Joe W.

Author_Institution

Silicon Technol. Dev., Texas Instrum. Inc., Dallas, TX, USA

fYear

2003

fDate

30 March-4 April 2003

Firstpage

166

Lastpage

172

Abstract

The reliability physics of low-k interconnect dielectrics is of great interest. Leakage, breakdown and TDDB data are presented for fluorinated silica, porous carbon-doped silica, and very porous carbon-doped silica. The breakdown and TDDB performance of the dielectrics are observed to degrade with the degree of porosity but the failure kinetics (field acceleration parameter and activation energy) seem to rather insensitive to porosity. A percolation model has been developed whereby the pores are treated as defects. The percolation model seems to describe well the observed breakdown and TDDB behavior.

Keywords

CVD coatings; Monte Carlo methods; dielectric thin films; electric breakdown; integrated circuit interconnections; integrated circuit reliability; leakage currents; percolation; porosity; porous materials; silicon compounds; CVD films; Cu; Monte Carlo simulation; SiO₂; SiOC; SiOF; TDDB performance; activation energy; breakdown data; current leakage; defects; dielectric reliability; failure kinetics; field acceleration parameter; interdigitated comb-serpent structure; intermetal dielectrics; intralevel dielectrics; leakage data; percolation model; porosity; porous low-k silica-based interconnect dielectrics; ramped breakdown; reliability physics; time-dependent dielectric breakdown; Degradation; Dielectric breakdown; Dielectric constant; Dielectric materials; Electric breakdown; Instruments; Materials reliability; Physics; Polarization; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International

Print_ISBN

0-7803-7649-8

Type

conf

DOI

10.1109/RELPHY.2003.1197739

Filename

1197739