Properties of cubic boron nitride films prepared by ion beam assisted deposition

Author

Kumagai, Motohiro ; Konuma, S. ; Setsuhara, Y. ; Miyake, S. ; Ogata, K. ; Kohata, M.

Author_Institution

Kanagawa High-Technol. Found., Japan

Volume

2

fYear

1999

fDate

36495

Firstpage

1140

Abstract

Boron nitride films were prepared by ion beam assisted deposition (IBAD). The films were synthesized on Si(100) substrates by depositing boron vapor under simultaneous bombardment with nitrogen ions and nitrogen-argon mixture ions. Properties of cubic boron nitride (cBN) films are studied especially regarding the crystallization of the films and the valence band spectra obtained from X-ray photoelectron spectroscopy (XPS). Structural analysis by Fourier transform infrared spectroscopy (FTIR) and cross-sectional transmission electron microscopy (TEM) confirms that polycrystalline films with a high cBN fraction were synthesized. Valence-band spectra obtained from XPS were measured to provide a method for characterization of the BN phases on the basis of experimental observations for the bulk cBN and hBN samples and theoretical prediction of densities of states

Keywords

Fourier transform spectra; III-V semiconductors; X-ray photoelectron spectra; boron compounds; infrared spectra; ion beam assisted deposition; semiconductor thin films; transmission electron microscopy; valence bands; wide band gap semiconductors; BN; Fourier transform infrared spectroscopy; X-ray photoelectron spectroscopy; cross-sectional transmission electron microscopy; crystallization; cubic BN films; ion beam assisted deposition; valence band spectra; Boron; Crystallization; Density measurement; Fourier transforms; Infrared spectra; Ion beams; Nitrogen; Phase measurement; Spectroscopy; Transmission electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology Proceedings, 1998 International Conference on

Conference_Location

Kyoto

Print_ISBN

0-7803-4538-X

Type

conf

DOI

10.1109/IIT.1998.813884

Filename

813884