Reliability of MEMS-based mass-flow controllers for semiconductor processing

Author

Lawrence, Elizabeth D. ; Henning, Albert K.

Author_Institution

Redwood Microsystems, Inc, Menlo Park, CA, USA

fYear

2003

fDate

30 March-4 April 2003

Firstpage

478

Lastpage

483

Abstract

Microfabricated components are finding increasing application in semiconductor processing. In this work, we report the results of detailed reliability and MTTF studies on mass-flow controllers (MFCs) created from silicon pressure sensors, microfabricated orifices for use in the flow sensor, and microvalves. Attributes studied include accuracy, response time, inboard leak rate, and particle generation, all monitored versus number of cycles. From these measurements, MTTF is calculated to be greater than 3M cycles. Failure modes are also discussed in detail.

Keywords

failure analysis; flow control; integrated circuit technology; microsensors; microvalves; pressure sensors; process control; seals (stoppers); semiconductor device reliability; MEMS-based mass-flow controllers; MTTF; accuracy; failure modes; flow sensor; inboard leak rate; microfabricated components; microfabricated orifices; microvalves; particle generation; reliability; response time; semiconductor processing; silicon pressure sensors; Linearity; Microvalves; Orifices; Process control; Protocols; Semiconductor device reliability; Sensor phenomena and characterization; Silicon; Temperature sensors; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International

Print_ISBN

0-7803-7649-8

Type

conf

DOI

10.1109/RELPHY.2003.1197795

Filename

1197795