Title :
Laser interaction with SiCr thin film resistors: "the bubble theory"
Author_Institution :
Product Anal., Analog Devices, Limerick, Ireland
fDate :
30 March-4 April 2003
Abstract :
This paper introduces a theoretical model to qualitatively describe the mechanisms involved during laser trimming of SiCr thin film resistors. The model was developed to address the problems encountered when trying to cut these resistors. It is based upon the physical laws of laser-matter interaction and extrapolates them to the confines of a thin film resistor. This was achieved with planar TEM images of the laser cut thin film resistors to provide support for the theory. With this model it was then possible to recommend and implement solutions about the design of the SiCr thin film in order to enhance its capabilities as a potential laser trim tab or thin film fuse.
Keywords :
bubbles; chromium; failure analysis; laser beam machining; silicon; surface tension; thin film resistors; transmission electron microscopy; SiCr; SiCr thin film resistors; bubble theory; failure analysis techniques; internal pressure; laser cutting; laser interaction; laser trim tab; laser trimming; laser-matter interaction; osmotic pressure; planar TEM images; surface tension; theoretical model; thin film fuse; Absorption; Electric resistance; Laser beam cutting; Laser beams; Laser modes; Laser theory; Optical pulses; Resistors; Thin film circuits; Transistors;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International
Print_ISBN :
0-7803-7649-8
DOI :
10.1109/RELPHY.2003.1197807
