Micro-machines for moving nm-scale objects

Summary form only given. A suite of microinstruments has been fabricated from single crystal silicon (SCS) using micromachining technology. Using, a high-aspect-ratio, SCS process, we have fabricated a microtribology machine, a microtensile machine and the world´s smallest Scanning Tunneling Microscope (STM), measuring 200 micrometers on-a-side. We discuss the fabrication and operation of movable, integrated actuators that produce nm-scale, precision motion, and show the first STM image obtained with a microSTM. Self supporting, movable single crystal silicon springs and electric-field drive structures with integrated, movable field emission and tunneling tips are described. These integrated devices include integrated resonant mass sensors, precision x-y-z microstages for instrument and sensor applications including scanning tunneling structures. In particular we discuss the fabrication and operation of silicon-based microinstruments including microinstruments with integrated, nanometer-scale tips. Such microinstruments include STM, AFM, scanned-probe instruments, electron beam instruments, atom and molecular manipulators; and materials-testing microinstrumentation. We discuss two SCS processes used to fabricate microinstruments 3D tip scanning. Array-architectures offer potential for smart, programmable (electrically or mechanically) tip-arrays; array cathodes for electron beam instruments; array sensors; and information storage systems with nm-scale per bit storage. Materials properties of interest include internal friction and fatigue