A summary of applications of uncooled microbolometer sensors

Author

Breen, Thomas ; Butler, Neal ; Kohin, Margaret ; Marshall, Charles A. ; Murphy, Robert ; Parker, Todd ; Piscitelli, Neil ; Silva, Ray

Author_Institution

Lockheed Martin IR Imaging Syst., Lexington, MA, USA

Volume

3

fYear

1999

fDate

1999

Firstpage

361

Abstract

Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled infrared imaging products for both military and commercial applications. These products are based on microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here we report on several applications that are utilizing the Lockheed Martin microbolometer sensor

Keywords

bolometers; elemental semiconductors; image sensors; infrared detectors; infrared imaging; microsensors; military equipment; silicon; Lockheed Martin; Si; commercial applications; infrared imaging products; military and commercial applications; silicon micromachined sensor; uncooled microbolometer sensors; wafer level silicon processing; Cameras; Crosstalk; Image sensors; Infrared image sensors; Optical imaging; Sensor arrays; Sensor phenomena and characterization; Sensor systems and applications; Silicon; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Aerospace Conference, 1999. Proceedings. 1999 IEEE

Conference_Location

Snowmass at Aspen, CO

Print_ISBN

0-7803-5425-7

Type

conf

DOI

10.1109/AERO.1999.789796

Filename

789796