DocumentCode
3440158
Title
Modeling and design of a sensor for two dimensional linear motors
Author
Crawford, D. ; Wong, F.Y. ; Youcef-Toumi, E.
Author_Institution
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
Volume
3
fYear
1995
fDate
21-27 May 1995
Firstpage
2367
Abstract
This paper presents the design, fabrication, and evaluation of an inductive position sensor for a two dimensional linear motor. The working principle and basic components of the sensor are described. A description of the model used to simulate the dynamics and investigate the effects of various design parameters is also presented. The result is a prototype sensor with a resolution of 4 microns
Keywords
electric sensing devices; feedback; frequency response; linear motors; position control; sensitivity analysis; simulation; 2D linear motors; dynamics; feedback; frequency response; inductive position sensor; modeling; sensitivity analysis; Coils; Induction motors; Magnetic cores; Magnetic flux; Magnetic sensors; Mechanical sensors; Permanent magnet motors; Sensor systems; Teeth; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation, 1995. Proceedings., 1995 IEEE International Conference on
Conference_Location
Nagoya
ISSN
1050-4729
Print_ISBN
0-7803-1965-6
Type
conf
DOI
10.1109/ROBOT.1995.525614
Filename
525614
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