• DocumentCode
    3441834
  • Title

    Wrap-gated inas nanowire field-effect transistor

  • Author

    Wernersson, Lars-Erik ; Bryllert, Tomas ; Lind, Erik ; Samuelson, Lars

  • Author_Institution
    Dept. of Solid State Phys., Lund Univ.
  • fYear
    2005
  • fDate
    5-5 Dec. 2005
  • Firstpage
    265
  • Lastpage
    268
  • Abstract
    Field-effect transistors (FETs) based on semiconductor nanowires (Bryllert et al., 2005) have the potential to improve certain aspects of existing planar FET technologies. The possibility to form wrap-gates gives an efficient gate coupling resulting in reduced drain-induced barrier lowering. Furthermore, lateral strain relaxation allows a new freedom in combining materials in heterostructures, where materials with different lattice constants can be combined without defects (Bjork et al., 2002). Since the transistor channel, unlike the planar FETs, is vertical, heterostructures may be used to tailor the bandstructure along the direction of current flow. In this paper, we demonstrate a new technology to fabricate vertical nanowire FETs in a process that almost exclusively relies on optical lithography and standard III-V processing techniques. We measure encouraging electrical data, including current saturation at Vds equiv 0.15 V (for Vg equiv 0 V) and low voltage operation Vth equiv -0.15 V, and present opportunities to improve the device performance by heterostructure design
  • Keywords
    III-V semiconductors; field effect transistors; indium compounds; low-power electronics; nanowires; photolithography; 0.15 V; InAs; drain induced barrier lowering; field effect transistor; gate coupling; heterostructures design; lateral strain relaxation; lattice constants; optical lithography; semiconductor nanowires; wrap gated nanowire; Capacitive sensors; Current measurement; Electric variables measurement; FETs; III-V semiconductor materials; Lattices; Lithography; Low voltage; Optical saturation; Semiconductor materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609324
  • Filename
    1609324