DocumentCode
3441834
Title
Wrap-gated inas nanowire field-effect transistor
Author
Wernersson, Lars-Erik ; Bryllert, Tomas ; Lind, Erik ; Samuelson, Lars
Author_Institution
Dept. of Solid State Phys., Lund Univ.
fYear
2005
fDate
5-5 Dec. 2005
Firstpage
265
Lastpage
268
Abstract
Field-effect transistors (FETs) based on semiconductor nanowires (Bryllert et al., 2005) have the potential to improve certain aspects of existing planar FET technologies. The possibility to form wrap-gates gives an efficient gate coupling resulting in reduced drain-induced barrier lowering. Furthermore, lateral strain relaxation allows a new freedom in combining materials in heterostructures, where materials with different lattice constants can be combined without defects (Bjork et al., 2002). Since the transistor channel, unlike the planar FETs, is vertical, heterostructures may be used to tailor the bandstructure along the direction of current flow. In this paper, we demonstrate a new technology to fabricate vertical nanowire FETs in a process that almost exclusively relies on optical lithography and standard III-V processing techniques. We measure encouraging electrical data, including current saturation at Vds equiv 0.15 V (for Vg equiv 0 V) and low voltage operation Vth equiv -0.15 V, and present opportunities to improve the device performance by heterostructure design
Keywords
III-V semiconductors; field effect transistors; indium compounds; low-power electronics; nanowires; photolithography; 0.15 V; InAs; drain induced barrier lowering; field effect transistor; gate coupling; heterostructures design; lateral strain relaxation; lattice constants; optical lithography; semiconductor nanowires; wrap gated nanowire; Capacitive sensors; Current measurement; Electric variables measurement; FETs; III-V semiconductor materials; Lattices; Lithography; Low voltage; Optical saturation; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location
Washington, DC
Print_ISBN
0-7803-9268-X
Type
conf
DOI
10.1109/IEDM.2005.1609324
Filename
1609324
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