Title :
Embedded MEMS filter chip and its fabrication for VHF applications
Author :
Mitarai, Shun ; Tada, Masahiro ; Yanagawa, Shusaku ; Yamaguchi, Toshihiro ; Kinoshita, Takashi ; Tanaka, Masahiro ; Ikeda, Koichi ; Yamashita, Keitaro
Author_Institution :
Semicond. Solutions Network Co., Sony Corp., Kanagawa
Abstract :
We developed a clamped-clamped beam micromechanical resonator for actual use in VHF applications. This three-port resonator showed good frequency spectra with a large peak height of 25 dB and a low background level of -77 dB. We designed a parallel beam layout incorporating this resonator for a bandpass filter. Fabricated bandpass filter has a bandwidth of 3.8 MHz at a center frequency of 97 MHz. MEMS filter was embedded in BiCMOS wafers without causing any process damage
Keywords :
BiCMOS integrated circuits; VHF filters; band-pass filters; micromechanical resonators; 3.8 MHz; 97 MHz; BiCMOS wafers; bandpass filter; clamped-clamped beam; embedded MEMS filter; frequency spectra; micromechanical resonator; parallel beam layout; Acoustic beams; Band pass filters; Bandwidth; CMOS technology; Equivalent circuits; Fabrication; Frequency; Micromechanical devices; Resonator filters; Silicon;
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-9268-X
DOI :
10.1109/IEDM.2005.1609331
