Title :
Piezoelectric RF MEMS tunable capacitor with 3V operation using CMOS compatible materials and process
Author :
Kawakubo, T. ; Nagano, T. ; Nishigaki, M. ; Abe, K. ; Itaya, K.
Author_Institution :
Toshiba Res. Consulting Corp., Kawasaki
Abstract :
A RF MEMS tunable capacitor having a piezoelectric bimorph actuator was developed using a CMOS compatible surface micromachining process. Folded beam piezoelectric actuators were introduced to cancel carling. Its continuous wide tuning ratio of 3 was realized at less than 3 V operations for the first time
Keywords :
capacitors; circuit tuning; micromachining; piezoelectric actuators; 3 V; CMOS compatible materials; CMOS compatible process; RF MEMS tunable capacitor; piezoelectric bimorph actuator; piezoelectric capacitor; surface micromachining; CMOS process; Capacitors; Electrodes; Micromechanical devices; Piezoelectric actuators; Piezoelectric devices; Piezoelectric materials; Radiofrequency microelectromechanical systems; Residual stresses; Voltage;
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-9268-X
DOI :
10.1109/IEDM.2005.1609332
