• DocumentCode
    3442017
  • Title

    PECVD-oxynitride gas chromatographic columns

  • Author

    Agah, M. ; Wise, K.D.

  • Author_Institution
    Bradley Dept. of Electr. & Comput. Eng., Virginia Tech., Blacksburg, VA
  • fYear
    2005
  • fDate
    5-5 Dec. 2005
  • Lastpage
    305
  • Abstract
    This paper describes the realization of low-power high-speed micro gas chromatography columns for portable gas analysis systems. The 25cm-long ultra-low-mass MEMS columns, fabricated using stress-free PECVD-oxynitride films in a CMOS-compatible process, allow high-performance separations of n-alkane gas mixtures, are capable of multi-second analysis, and can dissipate less than 10mW at 150degC in vacuum
  • Keywords
    chromatography; gas mixtures; gas sensors; low-power electronics; micromechanical devices; plasma CVD; 150 C; 25 cm; CMOS-compatible process; MEMS columns; PECVD; gas mixtures separation; microgas chromatography columns; oxynitride films; portable gas analysis; Energy consumption; Etching; Fabrication; Gas chromatography; Optical films; Optical refraction; Plasma measurements; Plasma temperature; Silicon; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609334
  • Filename
    1609334
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3442017