• DocumentCode
    3442420
  • Title

    Flow sensor using surface acoustic waves

  • Author

    Joshi, S.G.

  • Author_Institution
    Dept. of Electr., Comput., & Biomed. Eng., Marquette Univ., Milwaukee, WI, USA
  • fYear
    1988
  • fDate
    2-5 Oct 1988
  • Firstpage
    555
  • Abstract
    The use of a surface-acoustic-wave (SAW) device to measure rate of gas flow is described. The device is a delay-line stabilized SAW oscillator heated to a suitable temperature above the ambient. The delay line is placed in the path of the flowing gas. Flow of gas carries heat away by convection. This lowers the substrate temperature, thereby causing change in the oscillator frequency. The frequency of a 68-MHz oscillator fabricated on Y-cut, Z-propagating lithium niobate substrate increases by more than 160 kHz for variation in flow rate from 0 to 1000 ccm
  • Keywords
    flow measurement; flowmeters; surface acoustic wave devices; 68 MHz; LiNbO3; SAW; delay-line; gas flow; oscillator frequency; surface acoustic waves; Acoustic measurements; Acoustic sensors; Acoustic waves; Delay; Fluid flow; Fluid flow measurement; Frequency; Oscillators; Surface acoustic wave devices; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
  • Conference_Location
    Chicago, IL
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1988.49438
  • Filename
    49438
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3442420