Modelling and control of optical interference filters using plasma assisted chemical vapour deposition

Author

Linkens, D.A. ; Abbod, M.F. ; Metcalfe, J.G. ; Nichols, B.

Author_Institution

Dept. of Autom. Control & Syst. Eng., Sheffield Univ., UK

Volume

1

fYear

1999

fDate

36342

Firstpage

215

Abstract

Optical interference filters with continuously modulated refractive indices throughout their thickness (rugates) are designed and fabricated using microwave plasma-assisted chemical vapour deposition techniques. Intelligent modelling and control techniques are used to model the process and improve the reproducibility of reflection filters

Keywords

fuzzy control; fuzzy neural nets; intelligent control; interference filters; learning (artificial intelligence); modelling; neurocontrollers; optical control; optical design techniques; optical fabrication; plasma CVD; process control; refractive index; adaptive network; continuously modulated refractive indices; controller design; fabrication process design; fuzzy inference system; hybrid learning; intelligent control; intelligent modelling; microwave plasma-assisted CVD; neuro-fuzzy model; optical interference filters; predicted growth rate; process model; reflection filters; reproducibility; rugate filter design; Interference; Microwave filters; Optical control; Optical design; Optical design techniques; Optical filters; Optical modulation; Optical refraction; Optical variables control; Plasma chemistry;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Processing and Manufacturing of Materials, 1999. IPMM '99. Proceedings of the Second International Conference on

Conference_Location

Honolulu, HI

Print_ISBN

0-7803-5489-3

Type

conf

DOI

10.1109/IPMM.1999.792476

Filename

792476