Optimization of thickness distribution of micro-membrane by genetic algorithm

Author

Kotera, Hidetoshi ; Senga, Masatoshi ; Hirasawa, Taku ; Shima, Susumu

Author_Institution

Dept. of Mech. Eng., Kyoto Univ., Japan

Volume

1

fYear

1999

fDate

36342

Firstpage

245

Abstract

A simulation method for optimizing dynamic motion of micro-electro-mechanical devices and systems (MEMS) is proposed. A series of equations of electrostatic field, fluid dynamics and deflection of micro-membrane are coupled and solved simultaneously. Since the genetic algorithm is appropriate to reduce the search space of solution, □□ is used to optimize the thickness distribution of a micro-membrane. As an application of the developed method, the thickness distribution of the micro-membrane of a micro-air-pump is optimized. The prescribed performance of the micro-air-pump can be calculated

Keywords

Laplace equations; bending; boundary-elements methods; electrostatic actuators; finite element analysis; genetic algorithms; membranes; micropumps; simulation; FEM; Laplace equation; MEMS devices; air pressure field; bending; boundary element method; coupled equations; deflection equations; dynamic motion; electric field equation; electrostatic actuator; electrostatic field equations; fluid dynamics equations; genetic algorithm; micro-air-pump performance; micro-membrane thickness distribution; microactuator; optimization; reduced search space of solution; simulation method; stress equilibrium; Biomembranes; Electrodes; Electrostatics; Genetic algorithms; Laplace equations; Micromechanical devices; Optimization methods; Shape; Sputtering; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Processing and Manufacturing of Materials, 1999. IPMM '99. Proceedings of the Second International Conference on

Conference_Location

Honolulu, HI

Print_ISBN

0-7803-5489-3

Type

conf

DOI

10.1109/IPMM.1999.792482

Filename

792482