DocumentCode
3443553
Title
Diffractive lens fabrication by replica molding
Author
Lee, B.G. ; Scherer, A.
Author_Institution
Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA
fYear
2001
fDate
11-11 May 2001
Firstpage
84
Abstract
Summary form only given. Diffractive lenses and 2-D gratings were fabricated using electron-beam lithography and replica molding. With electron-beam lithography, feature sizes smaller than 60 nm can be achieved. We demonstrate that we can achieve similar feature sizes with replica molding. High-fidelity replica molding can become an important tool to complement electron-beam lithography in the fabrication of DOEs and other nanostructures.
Keywords
diffractive optical elements; electron beam lithography; microlenses; moulding; optical fabrication; replica techniques; 2-D gratings; chemically assisted ion beam etch; diffractive lens fabrication; diffractive optical elements; electron-beam lithography; high-fidelity molding; patterned PMMA; polydimethylsiloxane; replica molding; soft lithography; Diffraction; Fabrication; Lenses; Nanostructured materials; Nonlinear optics; Optical films; Optical materials; Optical refraction; Optical variables control; Soft lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-662-1
Type
conf
DOI
10.1109/CLEO.2001.947505
Filename
947505
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