Title :
Measurement of acoustic properties of liquid using SH- and R-mode surface acoustic wave
Author :
Nomura, Tooru ; Uchiyama, Masayuki ; Saitoh, Atsushi ; Furukawa, Shoji
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A new liquid sensor using multi-mode surface acoustic wave (SAW) delay lines is described. SAW having shear horizontal (SH) displacement and Rayleigh (R) mode SAW have been used for measuring the acoustic properties of liquid. A special feature of the sensor is that the SH-SAW and R-SAW delay line are constructed in one substrate. Each mode SAW delay line were constructed on one 36° YX LiNbO3 substrate. The SH-SAW was excited in the X direction and the R-SAW was excited in the direction at 90° to X on the substrate. The measurements were performed for water/glycerol solution. The experimental results show that the attenuation of the SH- and R-SAW are proportional to the viscosity and the density of the loaded solution, respectively. These results indicate that the SH-SAW and R-SAW are very suitable for measuring the acoustic properties of liquid
Keywords :
acoustic variables measurement; lithium compounds; organic compounds; substrates; surface acoustic wave delay lines; surface acoustic wave sensors; LiNbO3; LiNbO3 substrate; R-SAW; R-mode surface acoustic wave; Rayleigh mode SAW; SAW delay line; SH-SAW; SH-mode surface acoustic wave; X direction; acoustic properties; density; liquid sensor; loaded solution; multimode SAW delay lines; shear horizontal displacement; viscosity; water/glycerol solution; Acoustic measurements; Acoustic sensors; Acoustic waves; Attenuation; Delay lines; Displacement measurement; Performance evaluation; Sensor phenomena and characterization; Surface acoustic waves; Viscosity;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.717969
