DocumentCode
3444669
Title
85nm gate length enhancement and depletion mode InSb quantum well transistors for ultra high speed and very low power digital logic applications
Author
Datta, S. ; Ashley, T. ; Brask, J. ; Buckle, L. ; Doczy, M. ; Emeny, M. ; Hayes, D. ; Hilton, K. ; Jefferies, R. ; Martin, T. ; Phillips, T.J. ; Wallis, D. ; Wilding, P. ; Chau, R.
Author_Institution
Components Res., Intel Corp., Hillsboro, OR
fYear
2005
fDate
5-5 Dec. 2005
Firstpage
763
Lastpage
766
Abstract
We demonstrate for the first time 85nm gate length enhancement and depletion mode InSb quantum well transistors with unity gain cutoff frequency, fT, of 305 GHz and 256 GHz, respectively, at 0.5V VDS, suitable for high speed, very low power logic applications. The InSb transistors demonstrate 50% higher unity gain cutoff frequency, fT, than silicon NMOS transistors while consuming 10 times less active power
Keywords
III-V semiconductors; indium compounds; logic circuits; low-power electronics; quantum well devices; 0.5 V; 256 GHz; 305 GHz; 85 nm; InSb; depletion mode; digital logic applications; gate length enhancement; quantum well transistors; silicon NMOS transistors; Cutoff frequency; Epitaxial layers; Etching; Gallium arsenide; Logic devices; MOSFETs; Manufacturing; Photonic band gap; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location
Washington, DC
Print_ISBN
0-7803-9268-X
Type
conf
DOI
10.1109/IEDM.2005.1609466
Filename
1609466
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