• DocumentCode
    3444669
  • Title

    85nm gate length enhancement and depletion mode InSb quantum well transistors for ultra high speed and very low power digital logic applications

  • Author

    Datta, S. ; Ashley, T. ; Brask, J. ; Buckle, L. ; Doczy, M. ; Emeny, M. ; Hayes, D. ; Hilton, K. ; Jefferies, R. ; Martin, T. ; Phillips, T.J. ; Wallis, D. ; Wilding, P. ; Chau, R.

  • Author_Institution
    Components Res., Intel Corp., Hillsboro, OR
  • fYear
    2005
  • fDate
    5-5 Dec. 2005
  • Firstpage
    763
  • Lastpage
    766
  • Abstract
    We demonstrate for the first time 85nm gate length enhancement and depletion mode InSb quantum well transistors with unity gain cutoff frequency, fT, of 305 GHz and 256 GHz, respectively, at 0.5V VDS, suitable for high speed, very low power logic applications. The InSb transistors demonstrate 50% higher unity gain cutoff frequency, fT, than silicon NMOS transistors while consuming 10 times less active power
  • Keywords
    III-V semiconductors; indium compounds; logic circuits; low-power electronics; quantum well devices; 0.5 V; 256 GHz; 305 GHz; 85 nm; InSb; depletion mode; digital logic applications; gate length enhancement; quantum well transistors; silicon NMOS transistors; Cutoff frequency; Epitaxial layers; Etching; Gallium arsenide; Logic devices; MOSFETs; Manufacturing; Photonic band gap; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609466
  • Filename
    1609466