Study for micro mobile machine with piezoelectric driving force actuator

A pin type actuator for a micro mechanical system was previously proposed by the authors. According to their work, it is composed of a piezoelectric bimorph plate and a contact pin to generate the driving force in X-Y direction with the vibrational mode control. The micro mobile machine, composed of these actuators, is capable of high speed movement in forward backward, rotational and spiral modes in the narrow pipe. The two dimensional analytical study for the actuator is done by means of FEM with a comparison of experimental results. It is proved that the optimum driving condition is given at the specific resonant mode depending on the pin vibration