DocumentCode
3445272
Title
Joint IMGC-NMIJ Measurement of the Si (220) Lattice Spacing
Author
Fujimoto, H. ; Mana, G. ; Massa, G. ; Nakayama, K.
Author_Institution
Nat. Metrol. Inst. of Japan, Ibaraki
fYear
2004
fDate
38139
Firstpage
149
Lastpage
150
Abstract
Further details are given of a measurement of the (220) lattice spacing of silicon carried out by jointly the Istituto di Metrologia "G. Colonnetti" and the National Metrology Institute of Japan
Keywords
lattice constants; silicon; IMGC-NMIJ measurement; Si; Si (220) lattice spacing; lattice spacing measurement; Atom optics; Atomic measurements; Displacement measurement; Lattices; Metrology; Motion control; Motion measurement; Optical interferometry; Optical scattering; Solids;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location
London
Print_ISBN
0-7803-8494-6
Electronic_ISBN
0-7803-8494-6
Type
conf
DOI
10.1109/CPEM.2004.305504
Filename
4097159
Link To Document