DocumentCode :
3445272
Title :
Joint IMGC-NMIJ Measurement of the Si (220) Lattice Spacing
Author :
Fujimoto, H. ; Mana, G. ; Massa, G. ; Nakayama, K.
Author_Institution :
Nat. Metrol. Inst. of Japan, Ibaraki
fYear :
2004
fDate :
38139
Firstpage :
149
Lastpage :
150
Abstract :
Further details are given of a measurement of the (220) lattice spacing of silicon carried out by jointly the Istituto di Metrologia "G. Colonnetti" and the National Metrology Institute of Japan
Keywords :
lattice constants; silicon; IMGC-NMIJ measurement; Si; Si (220) lattice spacing; lattice spacing measurement; Atom optics; Atomic measurements; Displacement measurement; Lattices; Metrology; Motion control; Motion measurement; Optical interferometry; Optical scattering; Solids;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
Type :
conf
DOI :
10.1109/CPEM.2004.305504
Filename :
4097159
Link To Document :
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