DocumentCode
3445476
Title
Quartz crystal microbalance odor sensor coated with mixed-thiol-compound sensing film
Author
Saitoh, Atsushi ; Nomura, Toom ; Munoz, Severino ; Moriizumi, Toyosaka
Author_Institution
Dept. of Commun. Eng., Shibaura Inst. of Technol., Tokyo, Japan
fYear
1998
fDate
27-29 May 1998
Firstpage
685
Lastpage
690
Abstract
The selectivity of the quartz crystal microbalance odor sensor is influenced by the sensing film structure. Thiol compounds were used for the sensing film materials. We made and used several mixed sensing films with different film structures. The mixing ratio was varied to produce different film structures. From a comparison of the sensor response properties and the observation of the film structure by AFM, we verified that the different film structures and thus different response properties can be achieved by varying the mixed ratio of the sensing film. This result indicates that the control of the sensing film structure is important for obtaining a sensor with the desired response property. We demonstrated a new method for the deposition of sensing film with a desired response property, using the affinity between odor molecules and sensing film materials in the depositing solution. By using this method, we can easily obtain a sensor with the desired response property
Keywords
atomic force microscopy; crystal resonators; gas sensors; microbalances; quartz; AFM; SiO2; mixed-thiol-compound sensing film; mixing ratio; odor molecules; odor sensor; quartz crystal microbalance; sensor response properties; Atomic force microscopy; Atomic layer deposition; Chemical sensors; Electrodes; Force sensors; Frequency measurement; Gold; Resonance; Resonant frequency; Surface acoustic wave devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location
Pasadena, CA
ISSN
1075-6787
Print_ISBN
0-7803-4373-5
Type
conf
DOI
10.1109/FREQ.1998.717974
Filename
717974
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