Title :
A DC Voltage Reference Based on MEMS
Author :
Kärkkäinen, A. ; Awan, S.A. ; Oja, A. ; Kyynäräinen, J. ; Manninen, A. ; Tisnek, N. ; Seppä, H.
Author_Institution :
VTT Inf. Technol.
Abstract :
A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presented
Keywords :
micromechanical devices; reference circuits; DC voltage reference; capacitive MEMS device; micromechanical moving plate capacitor; Capacitors; Electrodes; Metrology; Microelectromechanical devices; Micromechanical devices; Silicon; Springs; Stability; Temperature dependence; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305515
