Past successes and future prospects for experimental electron scattering from fluorocarbon radicals

Summary form only given. In this Paper, differential cross sections for elastic scattering from fluorocarbon species (CF₂, CF₃) are collated and reviewed.^1-4 These results have been obtained using a unique experimental facility based at Flinders University that has enabled the first electron scattering experiments to obtain elastic differential scattering cross sections from these highly-reactive transient species.^5,6 These cross sections are also compared to elastic scattering cross sections for CF₄⁷ to understand how the incomplete valence shell occupation influences the electron scattering behaviour. Lastly, we describe ongoing efforts to upgrade our experimental capabilities that are aimed at providing electron scattering cross sections data for excitation processes from these fluorocarbon species, and other transient species relevant for greener plasma processing chemistries.