Novel solid-state spatial light modulator on integrated circuits for high-speed application with electro-optic thin film

Author

Fujimori, Y. ; Fujii, T. ; Suzuki, T. ; Kimura, H. ; Fuchikami, T. ; Nakamura, T. ; Takasu, H.

Author_Institution

Composite Devices Res. & Dev. Center, ROHM Co., Ltd., Kyoto

fYear

2005

fDate

5-5 Dec. 2005

Firstpage

935

Lastpage

938

Abstract

Novel solid-state spatial light modulator (SLM) is developed by using an electro-optic thin film technology. The use of sol-gel technique makes it possible to fabricate optically smooth 800nm-thick lead zirconate titanate (PZT) films. It shows large electro-optic effects Deltan=0.02 with the fastest switching response of 12ns that have ever been reported. The prototype 180times180 SLM array on 5mmtimes5mm-size chip demonstrates 2-dimensional displays with the three primary colors

Keywords

electro-optical devices; high-speed integrated circuits; spatial light modulators; thin film devices; 12 ns; 2D displays; 800 nm; electro-optic thin film; high-speed application; integrated circuits; lead zirconate titanate films; primary colors; sol-gel technique; solid-state spatial light modulator; switching response; Application specific integrated circuits; Electrooptic modulators; High speed integrated circuits; High speed optical techniques; Integrated circuit technology; Optical films; Optical modulation; Solid state circuits; Thin film circuits; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International

Conference_Location

Washington, DC

Print_ISBN

0-7803-9268-X

Type

conf

DOI

10.1109/IEDM.2005.1609513

Filename

1609513