• DocumentCode
    3445881
  • Title

    Tunable on-chip inductors up to 5 GHz using patterned permalloy laminations

  • Author

    Salvia, James ; Bain, James A. ; Yue, C. Patrick

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA
  • fYear
    2005
  • fDate
    5-5 Dec. 2005
  • Firstpage
    943
  • Lastpage
    946
  • Abstract
    This paper presents the design criteria, processing techniques, and measurement results for an on-chip inductor that uses a permalloy (Ni80Fe20) film to achieve a tunable reactance. Eddy currents and ferromagnetic resonance are suppressed in the thin permalloy film using patterning and laminations to enable operation in the RF range. Measurements results show a 40% increase in inductance, a 15% tuning range, and a Q between 5 and 11 up to 5 GHz
  • Keywords
    Permalloy; eddy currents; ferromagnetic resonance; inductors; laminations; thin films; Ni80Fe20; eddy currents; ferromagnetic resonance; on-chip inductors; patterning; permalloy laminations; thin permalloy film; tunable reactance; Active inductors; Conducting materials; Inductance; Lamination; Magnetic flux; Magnetic materials; Permeability; Radio frequency; Thin film inductors; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609516
  • Filename
    1609516
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3445881