Title :
Tunable on-chip inductors up to 5 GHz using patterned permalloy laminations
Author :
Salvia, James ; Bain, James A. ; Yue, C. Patrick
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA
Abstract :
This paper presents the design criteria, processing techniques, and measurement results for an on-chip inductor that uses a permalloy (Ni80Fe20) film to achieve a tunable reactance. Eddy currents and ferromagnetic resonance are suppressed in the thin permalloy film using patterning and laminations to enable operation in the RF range. Measurements results show a 40% increase in inductance, a 15% tuning range, and a Q between 5 and 11 up to 5 GHz
Keywords :
Permalloy; eddy currents; ferromagnetic resonance; inductors; laminations; thin films; Ni80Fe20; eddy currents; ferromagnetic resonance; on-chip inductors; patterning; permalloy laminations; thin permalloy film; tunable reactance; Active inductors; Conducting materials; Inductance; Lamination; Magnetic flux; Magnetic materials; Permeability; Radio frequency; Thin film inductors; Tunable circuits and devices;
Conference_Titel :
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Conference_Location :
Washington, DC
Print_ISBN :
0-7803-9268-X
DOI :
10.1109/IEDM.2005.1609516
