• DocumentCode
    3446463
  • Title

    Preparation of Quantum Hall Effect Device Arrays

  • Author

    Hein, G. ; Schumacher, B. ; Ahlers, F.J.

  • Author_Institution
    Phys.-Technische Bundesanstalt, Braunschweig
  • fYear
    2004
  • fDate
    38139
  • Firstpage
    273
  • Lastpage
    274
  • Abstract
    The preparation of quantum Hall effect device arrays at the PTB using multiterminal connections has been improved by the use of SiO2 as insulation material for the multilayer connections. The used lay-out avoids connections crossing the active sections of the devices. Arrays with ten devices in series as well as in parallel have been realised and successfully tested
  • Keywords
    Hall effect devices; electric resistance measurement; quantum Hall effect; SiO2; insulation material; multilayer connections; multiterminal connections; quantum Hall effect device; Circuit noise; Etching; Gold; Hall effect devices; Insulation; Magnetic field measurement; Resistors; Testing; Voltage; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements Digest, 2004 Conference on
  • Conference_Location
    London
  • Print_ISBN
    0-7803-8494-6
  • Electronic_ISBN
    0-7803-8494-6
  • Type

    conf

  • DOI
    10.1109/CPEM.2004.305569
  • Filename
    4097224