DocumentCode
3446481
Title
NRC Quantum Hall Devices for National Measurement Institutes
Author
Inglis, A.D.
Author_Institution
Inst. for Nat. Meas. Stand., National Res. Council, Ottawa, Ont.
fYear
2004
fDate
38139
Firstpage
275
Lastpage
276
Abstract
At CPEM´02 in Ottawa the NRC Electrical Standards Group undertook to fabricate a batch of Hall devices suitable for use at National Measurement Institutes as resistance standards. One wafer has been fabricated to date and testing of the electrical parameters of devices has commenced. The paper described the fabrication parameters, and preliminary test results
Keywords
Hall effect devices; electric resistance measurement; measurement standards; NRC; National Measurement Institutes; National Research Council; quantum Hall devices; resistance standards; Annealing; Councils; Electric resistance; Electrical resistance measurement; Fabrication; Gallium arsenide; Large-scale systems; Measurement standards; Molecular beam epitaxial growth; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location
London
Print_ISBN
0-7803-8494-6
Electronic_ISBN
0-7803-8494-6
Type
conf
DOI
10.1109/CPEM.2004.305570
Filename
4097225
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