The design and finite element analysis of a compliant 3-DOF spatial translational ultra-precise positioning platform

Author

Qiang, Chen ; Yong, Huang ; Dachang, Zhu ; Mugui, Zhou

Author_Institution

Coll. of Mech. & Electr. Control Eng., Jiangxi Univ. of Sci. & Technol., Ganzhou, China

Volume

3

fYear

2010

fDate

29-31 Oct. 2010

Firstpage

122

Lastpage

126

Abstract

Ultra-precise positioning platform plays a significant role in ultra-precise operation and micro-operation. A new compliant 3-DOF spatial translational ultra-precise positioning platform is proposed and it overcomes the shortcomings of the general conventional drive and transmission such as low speed of response and low displacement resolution. The platform is consist of flexible hinges which provide elastic supporting, and with piezoelectric actuators as its drives which has high stiffness, high speed of dynamic response, high kinematic accuracy and high resolution. The end effector of the platform come to spatial ultra-presice positioning after it drived by the compliant parallel links which drived by piezoelectric actuators. The finite element analysis shows it can reach to positioning. accuracy in nanoscale.

Keywords

control system synthesis; couplings; design engineering; drives; elasticity; finite element analysis; hinges; nanotechnology; piezoelectric actuators; compliant 3-DOF spatial translations ultra-precise positioning platform; drive; elastic supporting; finite element analysis; flexible hinges; kinematic accuracy; microoperation; piezoelectric actuators; stiffness; transmission; ultraprecise operation; Fasteners; Finite element methods; Manganese; Nanostructures; Robots; Stress; compliant mechanism; finite element analysis; flexure hinge; ultra-precise positioning platform;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Computing and Intelligent Systems (ICIS), 2010 IEEE International Conference on

Conference_Location

Xiamen

Print_ISBN

978-1-4244-6582-8

Type

conf

DOI

10.1109/ICICISYS.2010.5658674

Filename

5658674