Near-infrared transmission and emission characteristics of frequency selective surfaces and its nano-fabrication issues

Summary form only given. Frequency selective surfaces consist of conducting patch or aperture periodic arrays. They have been recognized for some time, as spectrally selective filters at microwave, millimeter and infrared wavelengths. Several manufacturing techniques are being considered to meet the demand for fast, reliable and cost-effective nano-lithography. One possible solution to nanostructure manufacturing is nanoimprint lithography. This technique is based on the physical deformation of the resist cast on a substrate by a mask with submicron structures on its surface. It offers a cost-effective alternative to DEBL. We will present a comparative study of FSSs fabrication by electron-beam and nanoimprint lithographies We provide a comparison between theory and experiment on the spectral properties of several FSSs in the 2-15 /spl mu/m range, examining several factors that influence the resonant drop in transmission of the FSSs: shape, size, spacing and sheet resistance of the elements and dielectric properties of the surroundings.