• DocumentCode
    3448272
  • Title

    Volume Determination of Silicon Spheres using an Improved Interferometer with Optical Frequency Tuning

  • Author

    Kuramoto, N. ; Fujii, K.

  • Author_Institution
    National Metrol. Inst. of Japan, National Inst. of Adv. Ind. Sci. & Technol., Tsukuba
  • fYear
    2004
  • fDate
    38139
  • Firstpage
    445
  • Lastpage
    446
  • Abstract
    For accurate volume measurements of 1-kg silicon spheres, an interferometer with a direct optical frequency tuning system has been improved. The diameter of a silicon sphere has been measured by the interferometer with a standard uncertainty of 2.3 nm. Details on the improvements and the result of the measurement are described
  • Keywords
    diameter measurement; light interferometry; optical tuning; silicon; volume measurement; 1 kg; diameter measurement; direct optical frequency tuning system; interferometer; silicon spheres; standard uncertainty; volume measurements; Charge coupled devices; Diode lasers; Frequency; Laser beams; Laser tuning; Measurement standards; Optical interferometry; Optical tuning; Phase shifting interferometry; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements Digest, 2004 Conference on
  • Conference_Location
    London
  • Print_ISBN
    0-7803-8494-6
  • Electronic_ISBN
    0-7803-8494-6
  • Type

    conf

  • DOI
    10.1109/CPEM.2004.305302
  • Filename
    4097313
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3448272