Title :
Volume Determination of Silicon Spheres using an Improved Interferometer with Optical Frequency Tuning
Author :
Kuramoto, N. ; Fujii, K.
Author_Institution :
National Metrol. Inst. of Japan, National Inst. of Adv. Ind. Sci. & Technol., Tsukuba
Abstract :
For accurate volume measurements of 1-kg silicon spheres, an interferometer with a direct optical frequency tuning system has been improved. The diameter of a silicon sphere has been measured by the interferometer with a standard uncertainty of 2.3 nm. Details on the improvements and the result of the measurement are described
Keywords :
diameter measurement; light interferometry; optical tuning; silicon; volume measurement; 1 kg; diameter measurement; direct optical frequency tuning system; interferometer; silicon spheres; standard uncertainty; volume measurements; Charge coupled devices; Diode lasers; Frequency; Laser beams; Laser tuning; Measurement standards; Optical interferometry; Optical tuning; Phase shifting interferometry; Silicon;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305302
