Title :
The investigation of local piezoelectric properties of piezoelectric transducers by acoustic microscopy
Author :
Mayev, R.G. ; Kolosov, O.V. ; Atayev, K.A. ; Levin, V.M.
Author_Institution :
Inst. of Chem. Phys., Acad. of Sci., Moscow, USSR
Abstract :
Local piezoelectric properties of film and plate piezoelectric transducers have been studied by transmission acoustic microscopy methods at a frequency of 450 MHz with a resolution of 3 μm. One-dimensional profiles and gray-scale acoustic images of the microstructure have been obtained. It is concluded that acoustic microscopy can be used effectively for the investigation of the nonmechanical characteristics of piezoelectric transducer specimens
Keywords :
acoustic microscopy; piezoelectric transducers; 450 MHz; acoustic microscopy; gray-scale acoustic images; local piezoelectric properties; microstructure; piezoelectric transducers; Acoustic transducers; Electrodes; Focusing; Frequency; Lenses; Microscopy; Piezoelectric transducers; Surface acoustic waves; Ultrasonic transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.1988.49483
