DocumentCode :
3449156
Title :
Helical etch channels in synthetic quartz crystals
Author :
Mikawa, Yutaka ; Hatanaka, Motohide ; Banno, Yasutaro
Author_Institution :
Fine Crystal Ltd., Hokkaido, Japan
fYear :
1998
fDate :
27-29 May 1998
Firstpage :
801
Lastpage :
805
Abstract :
Helical etch channels were found in the synthetic quartz crystal etched by both aqueous hydrofluoric acid (HF) solution at 20°C and ammonium fluoride (NH4F)+ HF mixture solution at 60°C. The quartz crystal used in this study contained many dislocations caused by the damaged layer of the seed surface. The etch channel density amounted to 2×104 pcs/cm2 and about 0.5% of them showed helical form. The distortion of the crystal was measured by X-ray reflection and the change of the parallelism of the lattice planes was observed: the crystal was curving. The direction of change of lattice planes suggests that a tension acts in the crystals. The cause of helical etch channel formation is explained as follows. Due to the tension, the growth direction of the dislocations are bent along weaker bonded lattice planes (for example R-planes) corresponding to the anisotropy of quartz. Thus, after etching, helical etch channels are formed
Keywords :
dislocation etching; quartz; (NH4F)+ HF mixture solution; 20 C; 60 C; HF; HF-H2O; NH4F-HF; SiO2; X-ray reflection; aqueous hydrofluoric acid solution; damaged layer; etch channel density; helical etch channels; lattice planes; parallelism; piezoelectric materials; seed surface; synthetic quartz crystals; Crystals; Etching; Hafnium; Heating; Lattices; Needles; Optical microscopy; Scanning electron microscopy; Surface cracks; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
ISSN :
1075-6787
Print_ISBN :
0-7803-4373-5
Type :
conf
DOI :
10.1109/FREQ.1998.717991
Filename :
717991
Link To Document :
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