DocumentCode
3449514
Title
Epitaxial relations in BaF2 films grown by MBE on Si(111) substrates
Author
Belenchuk, A. ; Fedorov, A. ; Zenchenko, V. ; Lukash, V. ; Vasilyev, A.
Author_Institution
Inst. of Appl. Phys., Acad. of Sci., Kishinev, Moldova
fYear
1995
fDate
11-14 Oct 1995
Firstpage
117
Lastpage
120
Abstract
The dependence of the epitaxial orientations of the films in BaF 2/Si(111) heterostructures on growth conditions and the influence of heat treatment on the stability of epitaxial relations in such structures are investigated. The correlations between the types of epitaxial relations and structures of interface are also discussed
Keywords
barium compounds; elemental semiconductors; epitaxial layers; heat treatment; interface structure; molecular beam epitaxial growth; semiconductor materials; semiconductor-insulator boundaries; silicon; BaF2-Si; MBE; Si; Si(111) substrates; epitaxial orientations; growth conditions; heat treatment; heterostructures; interface structure; semiconductor; Annealing; Conductive films; Electrons; Elementary particle vacuum; Molecular beam epitaxial growth; Semiconductor films; Spectroscopy; Substrates; Temperature; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location
Sinaia
Print_ISBN
0-7803-2647-4
Type
conf
DOI
10.1109/SMICND.1995.494877
Filename
494877
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