DocumentCode
34496
Title
DC and Microwave Plasmas for Synthesis of Vertically Oriented Graphene
Author
Zheng Bo ; Yilei Tian ; Kehan Yu ; Huachao Yang ; Dan Hu ; Junhong Chen ; Jianhua Yan ; Kefa Cen
Author_Institution
State Key Lab. of Clean Energy Utilization, Zhejiang Univ., Hangzhou, China
Volume
42
Issue
10
fYear
2014
fDate
Oct. 2014
Firstpage
2796
Lastpage
2797
Abstract
Plasma-enhanced chemical vapor deposition of vertically oriented graphene (VG) employing direct current glow discharge and microwave plasmas are presented and compared. The VG nanosheets with various morphologies can be obtained for diverse applications.
Keywords
graphene; microwave materials processing; nanofabrication; nanostructured materials; plasma CVD; sheet materials; C; DC plasmas; VG nanosheets; direct current glow discharge; microwave plasmas; morphologies; plasma-enhanced chemical vapor deposition; vertically oriented graphene; Chemical vapor deposition; Discharges (electric); Glow discharges; Graphene; Microwave imaging; Plasmas; Substrates; Plasma applications; plasma material processing; plasma sources; plasma sources.;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2014.2324176
Filename
6824824
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