DocumentCode
3449601
Title
Building biologically active molecules/neuronal cells architectures using microlithographic/semiconductor technologies
Author
Nicolau, Dan V. ; Taguchi, Takahisa ; Nicolau, Dana ; Yoshikawa, Susumu
Author_Institution
Osaka Nat. Res. Inst., Japan
fYear
1995
fDate
11-14 Oct 1995
Firstpage
133
Lastpage
136
Abstract
This paper presents an account on the usage of concepts, techniques and whole semiconductor manufacturing technologies (microlithography in particular) for complex biological architecture design and fabrication. The first level of application is based on surface property manipulation through classical (polymeric films), or advanced (Self-Assembled Monolayers, SAMs) microlithography for patterning biologically active molecules and/or cells, whereas the advanced application is based on integration of biological components (molecules or neuronal cells) as active parts of semiconductor devices
Keywords
biomolecular electronics; integrated circuit technology; lithography; monolayers; neural chips; polymer films; active parts; biologically active molecules; microlithographic technologies; neuronal cells architectures; polymeric films; self-assembled monolayers; semiconductor manufacturing technologies; surface property manipulation; Buildings; Cells (biology); Chemicals; Optical films; Photochemistry; Polymer films; Semiconductor device manufacture; Semiconductor films; Substrates; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location
Sinaia
Print_ISBN
0-7803-2647-4
Type
conf
DOI
10.1109/SMICND.1995.494881
Filename
494881
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