Title :
On the roles of multilayered metal catalysts in the synthesis of high-quality single-walled carbon nanotubes
Author :
Su, H.C. ; Shin, K.Y. ; Leou, K.C. ; Tsai, C.H.
Author_Institution :
Department of Engineering and System Science, Nation Tsing Hua University, 101 Sec. 2 Kuang Fu Road, Hsinchu, 300, Taiwan, ROC, e-mail: d947521@oz.nthu.edu.tw
Abstract :
In this paper, high quality single-walled carbon nanotubes (SWNTs) were synthesized by multilayered metal catalysts on silicon or silicon oxide substrate using thermal chemical vapor deposition method. The roles of multilayered metal catalyst were investigated by systematically varying the combinations of multilayered structure. Scanning electron microscopy, Atomic force microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy were used to examine the evolution of the morphology and the oxidation state of each constituent of the multilayered structure in the thermal processes and their roles in controlling the formation of SWNTs.
Keywords :
AES; SWNTs; XPS; multilayered metal catalysts; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Chemical vapor deposition; Morphology; Photoelectron microscopy; Scanning electron microscopy; Silicon; Spectroscopy; Thermal force; AES; SWNTs; XPS; multilayered metal catalysts;
Conference_Titel :
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN :
0-7803-9357-0
DOI :
10.1109/NANOEL.2006.1609699