Title :
Performance Improving of KRISS Micromachined Multijuntion Thermal Converter
Author :
Lee, Y.H. ; Kwon, S.W. ; Kim, K.J. ; Park, S.I. ; Ihm, Y.E.
Author_Institution :
Dept. of Material Eng., Chung Nam Nat. Univ., Daejeon
Abstract :
Thin-film multijunction thermal converters (MJTCs) with chromel-constantan thermocouples and an Evanohm R alloy heater were fabricated using semiconductor process and bulk micromachining. The voltage sensitivity and the ac-dc voltage transfer differences were evaluated. And the ac-dc transfer differences seem to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz
Keywords :
micromachining; thermocouples; thermoelectric conversion; voltage measurement; 1 to 500 kHz; Evanohm R alloy heater; MJTC; ac-dc voltage transfer differences; bulk micromachining; chromel-constantan thermocouples; micromachined multijunction thermal converter; semiconductor process; thin-film multijunction thermal converters; voltage sensitivity; Chromium alloys; Dielectric thin films; Frequency; Heat sinks; Heat transfer; Resistance heating; Semiconductor thin films; Silicon; Sputtering; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2004 Conference on
Conference_Location :
London
Print_ISBN :
0-7803-8494-6
Electronic_ISBN :
0-7803-8494-6
DOI :
10.1109/CPEM.2004.305394
